High Dirt Holding Capacity Filter CartridgesFeature and Benefits
Graded Filtration
Multi-layer Nano-fiber media with a graded pore size results in a filter with higher dirt holding capacity and longer service life.
Depth Filter for Polishing Slurry FiltrationCMPN Filter Cartridges use a unique rolled structure which ensures the precise
filtration of CMPN slurry. It captures the large particles efficiently and lets the usable
particles pass through. The graded pore size from outside to inside increases the
dirt holding capacity and extend the filter service life.
Photoresist Low Extractable Filter CartridgesPRNU Filter Cartridges are constructed with UPE membrane and HDPE cage, which
provides excellent chemical compatibility.
Depth Filter for Polishing Slurry FiltrationCMPA Filter Cartridges use a unique rolled structure which ensures the precise
filtration of CMPA slurry. It captures the large particles efficiently and lets the usable
particles pass through. The graded pore size from outside to inside increases the
dirt holding capacity and extend the filter service life.