HAPES Filter Cartridges are composed of specially-designed asymmetric HAPES membrane and high-purity PFA/HDPE material which make them ideally suited for state-of-the-art semiconductor fabrication processes. The HAPES media is suitable for the filtration of aqueous solutions including HF/BOE/Developer. The specially designed asymmetric structure of the membrane ensures ultra-fine pore size up to 2nm and high flow rates. High-purity PFA/HDPE and special rinse technology ensure ultra-low extractable and high cleanliness.
Asymmetric HAPES membrane pore sizes up to 2nm
High-purity PFA/HDPE and special rinse technology ensure ultra-low extractable and high cleanliness
| Filter Media | Asymmetric HAPES |
| End Cap /Core/Cage | HDPE |
| Max. Operating Temperature | 70°C |
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Cobetter Park, Heshang New Material Industrial Park, Xiaoshan District, Hangzhou 311265, China
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