Cobetter Chemphobic Filter Series are especially designed and ideally suited for high temperature and corrosive chemicals including hot H2SO4, H3PO4, HNO3, SPM, SC1, and SC2. The PTFE membrane ensures excellent chemical compatibility with consistent particles removal for a wide range of acids, bases and other process chemicals. All fluorine construction minimizes metal extractable and other contaminants and provides high flow rates and extended service life to meet high filtration efficiency.
Ultra-pure cleanliness reduces equipment set up time. Its one-piece structural design makes it easy to install and replace. Available in T, L and In-line configurations which simplify system design.
Application
Semiconductor
Wet etch and clean
Bulk chemicals
Feature
Excellent chemical compatibility
Higher flow rate and longer life time.
Ultra-low metal extractables.
| Membrane | PTFE | ||||
| Supports/Cage/Core/End Caps | PFA | ||||
| O-ring | TEV or FFKM | ||||
| Shell（Disposable onl） | PFA | ||||
| Max. Operating Temperature | 180°C | ||||
| Max. Differential Pressure | Cartridge 0.58MPa @25°C Disposable 0.49MPa @ 25°C | ||||
| Filter Areas | ø 68mm | | ø 83mm | |||
| X1 | X2 | Z1 | Z2 | Z2 | |
| 0.91 m²/10" | 1.21 m²/10" | 1.30 m²/10" | 2.20 m²/10" | 3.00 m²/10" | |
Ordering Information
Cartridge
| CHT | 1 | 2 | 3 | 4 | 5 | 6 | 7 |
| Block 1 | Block 2 | Block 3 | Block 4 | Block 5 |
Diameter | Removal Ratings | End Cap | Nominal Length | O-ring Material |
Z1=ø83mm Z2=ø83mm Z3=ø83mm X1=ø68mm X2=ø68mm | NM07=7nm NM10=10nm NM15=15nm NM20=20nm NM30=30nm NM50=50nm 0010=0.1μm 0020=0.2μm 0045=0.45μm 0050=0.5μm 0100=1.0μm 0300=3.0μm 0500=5.0μm 1000=10μm | TC=Standard ø83mm/ø68mm CLTC=For Cobetter PFA housing ø83mm/ø68mm ETC=For E PFA housing ø83mm TPCJ=For P PFA housing ø68mm | 03=3" ø68mm 04=4" ø68mm 10=10" ø83mm/ø68mm 20=20" ø83mm/ø68mm 30=30" ø83mm | P=TEV K=FFKM |
| Block 6 | Block 7 | |||
| Cleanliness | Package | |||
XS=＜1 μg/device S=＜3 μg/device L=＜10 μg/device LV=Metal＜10μg/device,low anion M=＜25μg/device H=＜40μg/device E=Electronic grade C=Industrial grade | 7/10nm 7/10nm 7/10nm 10/15/20/30nm ø68mm only 50nm 0.1/0.2/0.45/0.5/1/3/5/10μm 50nm 0.1/0.2/0.45/0.5/1/3/5/10μm 50nm 0.1/0.2/0.45/0.5/1/3/5/10μm | D=Dry W=Prewet, UPW | ||
Disposable
| CHT | 1 | 2 | 3 | 4 | 5 | 6 | 7 |
| Block 1 | Block 2 | Block 3 | Block 4 | |||
Diameter | Flow Type |
| Removal Ratings | Nominal Length | ||
Z1=ø83mm Z2=ø83mm Z3=ø83mm X1=ø68mm X2=ø68mm | N=In-line ø83mm T=T-flow ø83mm TV=T-flow core vent ø83mmL=L-flow ø83mm X=Small In-line ø68mm | NM07=7nm NM10=10nm NM15=15nm NM20=20nm NM30=30nm NM50=50nm 0010=0.1μm 0020=0.2μm 0045=0.45μm 0050=0.5μm 0100=1.0μm 0300=3.0μm 0500=5.0μm 1000=10μm | 05=5" In-line/Small In-line 10=10" In-line/T-flow/T-flow core vent/ | |||
| Block 5 | Block 6 | Block 7 | ||||
| Configuration | Inlet/Outlet | Head: Vent/Drain | Bowl: Vent/Drain | Total | Cleanliness | Package |
F82=CFL F83=CFL F62=CFL F63=CFL F42=CFL F43=CFL F32=CFL F33=CFL | 1" male 1" male 3/4" male 3/4" male 1/2" male 1/2" male 3/8" male 3/8" male | 1/4" male 3/8" male 1/4" male 3/8" male 1/4" male 3/8" male 1/4" male 3/8" male | 1/4" male 3/8" male 1/4" male 3/8" male 1/4" male 3/8" male 1/4" male 3/8" male | 5"/252mm, 10"/372mm 5"/252mm, 10"/372mm 5"/240mm, 10"/360mm 5"/240mm, 10"/360mm In-line 5"/240mm, 10"/360mm 5"/240mm, 10"/360mm 5"/240mm, 10"/360mm 5"/240mm, 10"/360mm | XS=＜1 μg/device (1/2/5nm) S=＜3 μg/device (1/2/5nm) L=＜10 μg/device (10/20/30/50nm) M=＜25 μg/device (10/20/30/50nm) H=＜40μg/device E= Electronic grade | D = Dry W = Prewet, UPW WH = Prewet, UPW+1% H2O2 |
P84=CPL P83=CPL P64=CPL P63=CPL S84=CPL-S S83=CPL-S S64=CPL-S S63=CPL-S | 1" male 1" male 3/4" male 3/4" male 1" male 1" male 3/4" male 3/4" male | 1/2" male 3/8" male 1/2" male 3/8" male 1/2" male 3/8" male 1/2" male 3/8" male | 1/2" male 3/8" male 1/2" male 3/8" male 1/2" male 3/8" male 1/2" male 3/8" male | 10"/385mm 10"/385mm 10"/385mm T-flow 10"/385mm T-flow core vent 10"/388mm L-flow(P64 only) 10"/388mm 10"/388mm 10"/388mm | ||
P84MMF=CPL P84F=CPL P64MMF=CPL P64F=CPL S84MMF=CPL-S S84F=CPL-S S64MMF=CPL-S S64F=CPL- | 1" male 1" femal 3/4" male 3/4" femal 1" male 1" femal 3/4" male 3/4" femal | 1/2" male 1/2" femal 1/2" male 1/2" femal 1/2" male 1/2" femal 1/2" male 1/2" femal | 1/2" femal 1/2" femal 1/2" femal 1/2" femal 1/2" femal 1/2" femal 1/2" femal 1/2" femal | T-flow core vent | ||
F42=CFL F32=CFL S42=CPL-S S32=CPL-S | 1/2" male 3/8" male 1/2" male 3/8" male | 1/4" male 1/4" male 1/4" male 1/4" male | 1/4" male 1/4" male 1/4" male 1/4" male | 5"/218.5mm 5"/218.5mm Small In-line 5"/201mm 5"/201mm | ||
16F, Building 1, Zicheng International Innovation Center, No.39 Jincheng Road, Xiaoshan District, Hangzhou 311215, China
Cobetter Park, Heshang New Material Industrial Park, Xiaoshan District, Hangzhou 311265, China
86-0571-87704359
sales@cobetterfilter.com
Derechos de autor de 2014 cobetter Filtration Equipment Co., Ltd. Todos los derechos reservados.
