Non-dewetting modified membrane improves surface energy
Cobetter Chemrapid Filter Series are composed of a surface-modified PTFE membrane that is bonded with PFA which results in ultra low metal extractables. It solves the problem of defect fluidity when if filters foam. Chemrapid Filter Series improve flow performance, cleanliness and contamination control at low wafer defect levels for highly corrosive acids and bases. The modified PTFE membrane enables semiconductor makers to meet their critical chemical filtration requirements.
Superior filtration efficiency and high flow rate
They are suitable for filtration of H2SO4, H3PO4, HNO3, HCl, NH4OH, H2O2, TMAH and deionized water at room temperature and SC1, SC2, SPM, metal etching and other applications at high temp ratures. Excellent chemical compatibility and ultra-low metal extractables ensure superior filtration efficiency and extended service life. The non-dewetting PTFE membrane
increases the surface energy providing high flow rates and superior filtration efficiency. Ultra-pure cleanliness reduces equipment set up time. Its one-piece structural design makes it easy to install and replace. Available in T, L and In-line configurations which simplify system design.
Application
Single Wafer and Batch Processing in advanced technology node
Wet etch and clean
Chemicals
Feature
Excellent chemical compatibility
All fluorine construction makes it suitable for the filtration of highly corrosive high temperature chemicals.
Suitable for critical condition
100% integrity tested
High flow rates, low pressure drop, long service life
Low extractables
Provided prewet option, reducing equipment pre-operation time.
| Membrane | Surface-modified PTFE | ||||||
Supports/Cage | PFA | ||||||
| O-ring | TEV or FFKM | ||||||
Shell ( Disposable only） | PFA | ||||||
Max. Operating | 180°C | ||||||
Max. Differential | Cartridge 0.58MPa @25°C Disposable 0.49MPa @ 25°C | ||||||
| Filter Areas | ø 68mm | ||||||
| X1 | X2 | ||||||
| 0.91 m²/10" | 1.21 m²/10" | ||||||
| ø 83mm | |||||||
| Z1 | Z2 | Z3 | Z4 | Z5 | |||
| 1.30 m²/10" | 2.20 m²/10" | 3.0 m²/10" | 2.20 m²/10" 120-160°C) | 3.0 m²/10" (High temperature) | |||
Ordering Information
Cartridge
| CHR | 1 | 2 | 3 | 4 | 5 | 6 | 7 |
| CHP*(15nm) | |||||||
| Block 1 | Block 2 | Block 3 | Block 4 | Block 5 |
Diameter | Removal Ratings | End Cap | Nominal Length | O-ring Material |
Z1=ø83mm Z2=ø83mm Z3=ø83mm Z4=ø83mm Z5=ø83mm X1=ø68mm X2=ø68mm | NM07=7nm NM10=10nm NM15=15nm NM20=20nm NM30=30nm NM50=50nm 0010=0.1μm 0020=0.2μm 0045=0.45μm 0050=0.5μm | TC=Standard ø83mm/ø68mm CLTC=For Cobetter PFA housing ø83mm/ø68mm ETC=For E PFA housing ø83mm TPCJ=For P PFA housing ø68mm | 10=10" 20=20" | P=TEV K=FFKM |
| Block 6 | Block 7 | |||
| Cleanliness | Package | |||
XS=＜1 μg/device S=＜3 μg/device L=＜10 μg/device M=＜25μg/device H=＜40μg/device E=Electronic grade | 7/10nm 7/10nm 10/15/20/30nm ø68mm only 50nm 0.1/0.2/0.45/0.5μm 50nm 0.1/0.2/0.45/0.5μm | D=Dry W=Prewet, UPW | ||
Disposable
| CHR | 1 | 2 | 3 | 4 | 5 | 6 | 7 |
| CHP*(15nm) | |||||||
| Block 1 | Block 2 | Block 3 | Block 4 | |||
Diameter | Flow Type |
| Removal Ratings | Nominal Length | ||
Z1=ø83mm Z2=ø83mm Z3=ø83mm Z4=ø83mm Z5=ø83mm X1=ø68mm X2=ø68mm | N=In-line ø83mm T=T-flow ø83mm TV=T-flow core vent ø83mmL=L-flow ø83mm X=Small In-line ø68mm | NM07=7nm NM10=10nm NM15=15nm NM20=20nm NM30=30nm NM50=50nm 0010=0.1μm 0020=0.2μm 0045=0.45μm 0050=0.5μm | 05=5" In-line/Small In-line 10=10" In-line/T-flow/T-flow core vent/ | |||
| Block 5 | Block 6 | Block 7 | ||||
| Configuration | Inlet/Outlet | Head: Vent/Drain | Bowl: Vent/Drain | Total | Cleanliness | Package |
F82=CFL F83=CFL F62=CFL F63=CFL F42=CFL F43=CFL F32=CFL F33=CFL | 1" male 1" male 3/4" male 3/4" male 1/2" male 1/2" male 3/8" male 3/8" male | 1/4" male 3/8" male 1/4" male 3/8" male 1/4" male 3/8" male 1/4" male 3/8" male | 1/4" male 3/8" male 1/4" male 3/8" male 1/4" male 3/8" male 1/4" male 3/8" male | 5"/252mm, 10"/372mm 5"/252mm, 10"/372mm 5"/240mm, 10"/360mm 5"/240mm, 10"/360mm In-line 5"/240mm, 10"/360mm 5"/240mm, 10"/360mm 5"/240mm, 10"/360mm 5"/240mm, 10"/360mm | XS=＜1 μg/device (7/10nm) S=＜3 μg/device (7/10nm) L=＜10 μg/device (10/15/20/30nm) M=＜25 μg/device (50nm/0.1/0.2/0.45/0.5) H=＜40μg/device E= Electronic grade | D = Dry W = Prewet, UPW |
P84=CPL P83=CPL P64=CPL P63=CPL S84=CPL-S S83=CPL-S S64=CPL-S S63=CPL-S | 1" male 1" male 3/4" male 3/4" male 1" male 1" male 3/4" male 3/4" male | 1/2" male 3/8" male 1/2" male 3/8" male 1/2" male 3/8" male 1/2" male 3/8" male | 1/2" male 3/8" male 1/2" male 3/8" male 1/2" male 3/8" male 1/2" male 3/8" male | 10"/385mm 10"/385mm 10"/385mm T-flow 10"/385mm T-flow core vent 10"/388mm L-flow(P64 only) 10"/388mm 10"/388mm 10"/388mm | ||
P84MMF=CPL P84F=CPL P64MMF=CPL P64F=CPL S84MMF=CPL-S S84F=CPL-S S64MMF=CPL-S S64F=CPL- | 1" male 1" femal 3/4" male 3/4" femal 1" male 1" femal 3/4" male 3/4" femal | 1/2" male 1/2" femal 1/2" male 1/2" femal 1/2" male 1/2" femal 1/2" male 1/2" femal | 1/2" femal 1/2" femal 1/2" femal 1/2" femal 1/2" femal 1/2" femal 1/2" femal 1/2" femal | T-flow core vent | ||
F42=CFL F32=CFL S42=CPL-S S32=CPL-S | 1/2" male 3/8" male 1/2" male 3/8" male | 1/4" male 1/4" male 1/4" male 1/4" male | 1/4" male 1/4" male 1/4" male 1/4" male | 5"/218.5mm 5"/218.5mm Small In-line 5"/201mm 5"/201mm | ||
16F, Building 1, Zicheng International Innovation Center, No.39 Jincheng Road, Xiaoshan District, Hangzhou 311215, China
Cobetter Park, Heshang New Material Industrial Park, Xiaoshan District, Hangzhou 311265, China
86-0571-87704359
sales@cobetterfilter.com
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