Cobetter Chemvast™ Filter Series are available in wide variety of PTFE membranes including hydrophobic PTFE, hydrophilic PTFE or non-dewetting PTFE. HDPE Cage enhances its chemical compatibility making it suitbable for most chemical liquid filtration applications.
It effectively removes particles from high purity chemicals in the semiconductor industry. Available in a wide range of retention ratings and pore sizes to meet customer's requirements.
Non-dewetting PTFE increases the surface energy of the membrane and ensures high flow rates and filtration efficiency. With its HDPE Cage and high purity membrane, Chemvast Filters reduce costs when compared to Chemrapid Filter Series. Chemvast Hydrophilic PTFE membrane can be used to filter polar solvents without pre-wetting.
Application
High-viscosity photoresist and photochemicals
Wet etch and clean
Bulk chemicals
Feature
Wet etch and clean
Suitable for a wide range of chemicals filtration
100% integrity tested
Higher flow rate and longer life time.
Low metal extractables and Enhanced retention of particles, avoid cross contamination.
Membrane | Hydrophobic PTFE/ Hydrophilic PTFE / Non-dewetting PTFE | ||||
Supports/Cage/Core/End Caps | HDPE | ||||
O-ring | TEV or FFKM | ||||
Max. Operating Temperature | 70°C | ||||
Max. Differential Pressure | 0.4 MPa / 21°C | ||||
Filter Areas | ø 68mm | | ø 83mm | |||
X1 | X2 | Z1 | Z2 | Z2 | |
0.9 m²/10" | 1.3 m²/10" | 1.30 m²/10" | 1.9 m²/10" | 2.2 m²/10" |
Ordering Information
Cartridge
CHV | 1 | 2 | 3 | 4 | OTC | 5 | 6 | 7 | 8 |
Block 1 | Block 2 | Block 3 | Block 4 | Block 5 |
Support / Core | Removal Ratings | Diameter | Removal Ratings | Nominal Length |
□ =HDPE / HDPE P =HDPE / PP | T=Hydrophobic H=Hydrophilic 50nm/0.1/0.2/0.5/ 1.0/3.0/5.0/10μm R=Non-dewetting 7/10/15/20/50nm/ 0.1μm | Z1=ø83mm Z2=ø83mm Z3=ø83mm X1=ø68mm X2=ø68mm | NM07=7nm NM10=10nm NM15=15nm NM20=20nm NM30=30nm NM50=50nm 0010=0.1μm 0020=0.2μm 0045=0.45μm 0050=0.5μm 0100=1.0μm 0300=3.0μm 0500=5.0μm 1000=10μm | 04=4" 10=10" 20=20" 09P=9" P ABD Type 10P=10" P ABD Type 20P=20" P ABD Type 30P=30" P ABD Type |
Block 6 | Block 7 | Block 8 | ||
O-ring Material | Cleanliness | Package | ||
P=TEV E=EPDM | M=<25μg/device H=<40μg/device E= Electronic grade | D=Dry W=Prewet, UPW |
Compact Capsule
CHV | 1 | 2 | 3 | 4 | 5 |
Block 1 | Block 2 | Block 3 | Block 4 | Block 4 | |||
Membrane | Removal Ratings | Fitting Type | Inlet/Outlet | Vent/Drain | O-ring Material | Package | |
T=Hydrophobic H=Hydrophilic 50nm 0.1/0.2/0.5/1.0/3.0/ 5.0/10μm R=Non-dewetting 7/10/15/20/50nm/ 0.1μm | NM07=7nm NM10=10nm NM15=15nm NM20=20nm NM30=30nm NM50=50nm 0010=0.1μm 0020=0.2μm 0045=0.45μm 0050=0.5μm 0100=1.0μm 0300=3.0μm 0500=5.0μm 1000=10μm | SW43E=SW SW44E=SW SW984E=SW PL54LE=CPL PL54ME=CPL NPT42E=NPT FL64E=CFL | 1/4" 1/4" 1/2" 8mm 8mm 1/4" 3/8" | 4mm 1/4" 1/4" 4mm 4mm 1/8" 1/4" | P=TEV E=EPDM | D=Dry W=Prewet, UPW | |