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SEM-Grade Chemicals Filtration Solutions
High Precision All Fluorine Filter Cartridges

SEM-PFA Filter Cartridges are composed of high-purity PFA 440HP. The all-fluorine structure provides high temperature tolerance and corrosion resistance which are good features for electronic grade chemical filtration.


Precise Pore Sizes

  • Available in 0.02μm, 0.05μm, and 0.1μm pore sizes for use in the semiconductor industry.

All-Fluorine Structure

  • A high-purity PFA 440HP structure ensures low extractable.

Pre-Wetting Packaging

  • Available in pre-wetted package for easy use.

Excellent Chemical Compatibility

  • A PTFE membrane combined with PFA structure results in a filter with high temperature and corrosion resistance.


  • Características del trabajo
  • Características del caudal
  • Información de pedidos

Operating Conditions

Filter MediaPTFE
End cap /Core/CagePFA
Max. Operating Temperature170°C
Max. Differential Pressure0.4 MPa / 21°C
0.24 MPa / 80°C
Metal Ion Leach<1ppb
TOC Leach<10ppb
Particle Flush0.2μm particles<10 grains/CC
Filter Area1.08 m² / 10 inch


Flow Rate Characteristics


Ordering Information

High Precision All Fluorine Filter Cartridges Ordering Information


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